1. The detector shall be capable of measuring emission spectrum in XUV energy range of 5-35nm.
2. Detector imaging area shall be 2048 x 512 pixels minimum with a maximum pixel size of 13.5 μm x 13.5 μm.
3. The detector (including cables) shall be vacuum compatible to 10-6 torr or better.
4. The detector shall be capable of being cooled to an operating temperature of -40ºC.
5. The detector shall be able to operate in either the single shot mode or at ≥ 2 Hz frame rate mode.
6. The digitizer shall be 16 bit.
7. The detector shall meet or exceed the following requirements:
a. Linear full well: >70ke-
b. Readout noise: < 20e- RMS