The National Institute of Standards & Technology (NIST) seeks information on commercial vendors that are capable of providing a UV Photoresist Curing System which is required for a photoresist stabilization step where patterned photoresist material is exposed to radiation having a wavelength that promotes cross-linking in the shallow surfaces of the patterned photoresist features. The diversity of mask pattern and material systems encountered from the wide range of projects at NIST demands an advanced and flexible UV photoresist curing system to provide researchers more stable and precise lithography result. The UV Photoresist Curing System needs to provide uniform UV light intensity over the 200mm x 200mm curing area with controllable exposure time. UV shield has to be available as an option.

After results of this market research are obtained and analyzed and specifications are developed for the UV Photoresist Curing System that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside.

NIST has a need for a UV Photoresist Curing System that would meet the following preliminary requirements:

UV Photoresist Curing System:
• UV beam spectrum ranges from 320nm to 450nm
• Illumination intensity ≥ 8 mW/cm2 @ 365nm
• Adjustable light intensity or lamp height
• Curing area up to 200mm x 200mm
• Automatic exposure time control
• Tabletop system
• The system needs to be able to accommodate the installation of heated sample stage
• Available options for various and shorter wavelengths.
• A system with capabilities of programmable control on exposure time and lamp intensity level

NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice.

Companies that manufacture UV Photoresist Curing System are requested to email a detailed report describing their abilities to [email protected] no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to [email protected] are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.

 

Bid Protests Not Available