SOLICITATION NO.: SB1341-14-RQ-0521
THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL SERVICES PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6 - STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. FAR PART 13 SIMPLIFIED ACQUISITION PROCEDURES ARE UTILIZED IN THIS PROCUREMENT. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-76.***
*** The associated North American Industrial Classification System (NAICS) code for this procurement is 334419 with a small business size standard of 500 employees.***
***This acquisition is being set-aside 100% for small business***
***All interested small businesses may provide a firm fixed-price quotation for (1) Spectral Reflectometer in accordance with the minimum specifications included herein:
CLIN 0001: Spectral Reflectometer
Qty: 1 ea.
CLIN 0002: Trade-in of Filmetrics F20-UV (s/n 99D081)
Qty: 1 ea.
CLIN 0003: Warranty
Qty: 1 ea.
The following are the min. specifications:
I. BACKGROUND INFORMATION
Materials Science and Engineering Division is involved in the development of measurement methodologies for the measurement of polymeric systems related to additive manufacturing, polymer separations, water filtration, sustainable composites, energy storage and renewable polymers. Work in each of these areas relies on the use of polymer thin films to provide a model system geometry to investigate fundamental properties in the systems of interest. In polymer thin films the film thickness is a crucial parameter for the success of the experiments. Films prepared by flow coating or spin coating can be quickly analyzed using a spectral reflectometer positioned nearby or directly on the coating instrument. While film thickness can be determined by x-ray, ellipsometery, and AFM, these instruments are significantly more expensive, slower, destructive, and less amenable to integration in to process controls. Furthermore, spectral reflectometers can provide film thickness information in situ during annealing processes. A spectral reflectometer used for this purpose must be capable of quickly measuring film thicknesses at long working distances and have the ability to accurately measure a wide variety of polymer systems.
II. SCOPE OF WORK
Although there are numerous types of spectral reflectometers available from a variety of manufactures and vendors, not all of them provide a large database of refractive index (n) and extinction coefficients (k) for polymers, user support for developing new n and k values, automatic and continuous wavelength corrections, and granular adjustment of acquisition and fitting parameters. Our existing spectral reflectometer lacks wavelength correction and lacks support for the current generation of Windows operating system which makes usage, data portability, and upkeep extremely cumbersome. Updating this instrument will provide a quick and reliable film thickness measurement for a variety of projects and allow users to interface thickness measurements into automated experimental processes using modern hardware and software.
III. SPECIFICATIONS
The Contractor shall provide one (1) analytical instrument system that meets the following minimum technical requirements.
Hardware:
• Must be a benchtop spectral reflectometer.
• Must be able to perform thickness measurements on polymer thin films ≥ 3 nm.
• Must have an integrated lamp(s) producing a stable spectrum at or wider than 200 nm to 1100 nm.
• Must measure wavelength from 200 nm to 1100 nm.
• Must have a measurement spot size of ≤ 1.5 mm.
• Must have variable height focus.
• Must have a working distance of ≥ 3 cm.
• Must be able to acquire a complete spectrum in ≤ 25 ms.
• Must have a film thickness repeatability of ~ 0.1 nm.
• Must have a film thickness resolution of ≤ 0.4 %.
• Must operate at ambient temperatures, 20 C to 30 C.
• Light path/stage must be able to reach the center of a 125 mm diameter silicon wafer
• Must be capable of measuring thin films prepared silicon wafers up to 125 mm in diameter and 0.5 mm to 10 mm thick (i.e. the wafer dimension are 125 mm by 0.5 mm to 10 mm).
• Must provide the ability to move the optical path (fiber optic) to custom setups such as clamped to a ring stand over a spincoater.
• Must provide the ability to measure film thickness through quartz (1/4" thick) windowed annealing chambers where the head space above the film will be saturated with common polymer solvents (e.g. toluene, tetrahydrofuran, acetone, xylenes, benzene, mono di tri chlorobenzenes, etc.) where the chamber will be ~1.5" in height
• Must demonstrate prior performance in the form of references from 3-4 research focused users (i.e. academic, National Lab, etc).
• Must demonstrate corporate competency in polymer thin films.
• Must demonstrate use of instrument for polymer thin films in peer reviewed scientific publications.
• Must provide optical constant support for development of new n,k-tables as needed.
• Must provide control and analysis software compatible with Windows 7 Enterprise and updated to be compatible as security fixes are released for Windows 7 Enterprise.
• Must provide the ability to easily move control software to new PCs as systems are upgraded at NIST.
• Must provide optical path which is easily mountable onto ¼-20 "bread board" optical stages.
• Lamp and stage must be separable by at least 1 m via fiber optic cable.
• Must provide the ability to define at least 5 layers for spectrum fitting.
• Must provide granular control spectrum acquisition time.
• Must provide granular control wavelength [λ] range, wavelength dependent refractive index [n(λ)], and wavelength dependent extinction coefficient [k(λ)], layer non-uniformity, film roughness, film thickness, and gradient of n(λ) and k(λ) for each layer.
• Must provide multiple regression methods for fitting defined layers to measured spectrum.
• Control and analysis software must support bidirectional integration into a .NET programming language such as Visual Basic, .NET, or C#.
• Must provide the ability to export all measured/recorded/raw/calculated data to ASCII text, CSV, or MS Excel (xlsx) formats.
• Must provide a single software executable for instrument control and data analysis, e.g., control and analysis should be in the same executable.
• Must provide readily available software updates, firmware updates, and driver updates.
• Must provide 24 h business day technical support.
• Must provide trade-in credit for Flimetrics F20-UV (SN 99D081).
• Must provide live video, integrated into software, with simultaneous spectrum and image capture.
System Requirements:
• In addition to the performance requirements of the system listed above, the spectral reflectometer must have a single point interface (USB) to the control software.
• The system must include an operations and maintenance manual covering proper operation, routine maintenance, software interface commands, and trouble shooting for the instrument and controlling software
o The manual may be supplied in hard copy or electronic format (or both).
Trade In:
The current instrument, Filmetrics F20-UV (SN 99D081), is available for trade-in credit as a part of this requirement.
Warranty:
The Contractor shall include at least a one (1) year warranty on all parts, excluding bulbs or other typically replicable parts.
IV. PERIOD OF PERFORMANCE
The period of performance shall be one (1) year from award of this requirement.
V. PLACE OF PERFORMANCE
All work shall be completed at the Contractor's facility.
VI. GOVERNMENT FURNISHED PROPERTY
A PC with Windows 7 Enterprise, keyboard, mouse, and Monitor with at least 2 available USB ports will be provided.
VII. DELIVERABLES
Description Quantity Due Date
Analytical instrument One (1) 30 days after award of this requirement.
Operations and maintenance manual for the analytical instrument One (1) 30 days after award of this requirement
System installation and training shall be completed within 90 days from the award of the purchase order.
Delivery shall be FOB Destination.
***QUOTATION PREPARATION INSTRUCTIONS***
VOLUME I -- TECHNICAL QUOTATION:
Factor A - Appearance in Peer Reviewed Literature
The Offeror shall provide at least 5 citations from peer review publications in which their spectral reflectometer, of similar capability to what will be awarded in this request, was used to measure polymer thin films, examples of ultra thin films (< 5 nm), and integration into other experimental setups is encouraged. The quality of the work, impact factor, and age of publication will also be evaluated. The government has the right to consider data obtained from other sources.
Factor B - Polymer Database.
The Offeror shall provide a complete list of materials, n,k values, and applicable wavelength.
Factor C - Automatic Wavelength Correction
The Offeror shall provide a method for automatic wavelength correction. Speed, ease of use, and accuracy will be evaluated.
Factor D - Granular Control
The Offeror shall provide a list of user adjustable parameters for the acquisition of spectral reflectance and fitting of spectral reflectance curve.
Factor E - Acquisition and fitting software interfaces
The Offeror shall provide list of commands and brief description of each command available for custom programs (and applicable languages) to access acquisition and fitting features.
VOLUME II -- PRICE QUOTATION:
The offeror shall: a) submit a firm, fixed-price, for the analytical instrument system and the trade-in; b) specify warranty information for the Spectral Reflectometer; and c) indicate the no. of days after receipt of an order to allow for delivery.
EVALUATION CRITERIA FOR SPECTRAL REFLECTOMETER
The Government intends to award a single contract from this solicitation. The Government reserves the right not to award a contract.
The Government intends to evaluate quotations and award a purchase order without discussions with offerors. Therefore, the offeror's initial quotation should contain the offeror's best terms from a price and technical standpoint. However, the Government reserves the right to conduct discussions if later determined by the Contracting Officer to be necessary. The Government may reject any and or all quotations if such action is in the public interest.
The award of this contract resulting from the solicitation will be made to the Offeror whose Quotation offers the best value, through the trade-off process, to the Government from a technical, risk, and price/cost perspective. In determining what offer provides the best value, technical evaluation factors are considered significantly more important than cost. Award will be made to the Contractor: (1) whose quotation is technically acceptable; (2) whose technical and price relationship is considered to be the most advantageous to the Government; and (3) who is considered to be responsible within the meaning of FAR 9.104. Price will be a factor in the award decision, although the award may not necessarily be made to that Offeror submitting the lowest price. Likewise, award will not necessarily be made for technical capabilities that would appear to exceed those needed for the successful performance of the required services. When technical factors become equal among quotations, price will be the determining factor.
Factors B, and C are equally weighted likewise Factors D and E are equally weighted. As a whole the sum of Factors B and C are of equal weight to the sum of Factors D and E.
TECHNICAL FACTORS
Factor A - Appearance in Peer Reviewed Literature
NIST will evaluate the extent to which the Offerer's instrumentation appears in the polymer thin films peer reviewed scientific literature.
Factor B - Polymer Database
NIST will evaluate the breadth of the n,k-tables database for polymers and explicitly stated support for development of new n,k-tables. Where n,k-tables refers to the wavelength dependent refractive index and extinction coefficients for each material.
Factor C - Wavelength Calibration
NIST will evaluate the extent to which the Offeror's instrument implements wavelength calibrations.
Factor D - Granular control
NIST will evaluate the freedom of parameter choices for both spectral acquisition and fitting. This includes but is not limited to, acquisition time, wavelength range, and layer parameters (thickness, gradient, roughness, n,k-tables).
Factor E - Control and fitting software interface
NIST will evaluate the controls available via DLL or other methods for the acquisition and fitting controls via custom programs written by NIST employers or other contractors.
Price
NIST will evaluate the offeror's proposed prices, trade-in value, warranty information and projected delivery time to determine whether the proposed prices, trade-in value, warranty and delivery period are realistic, complete, and reasonable in relation to the solicitation requirements.
***PROVISIONS / CLAUSES***
The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/far/index.html
The following provisions apply to this acquisition:
52.212-1 Instructions to Offerors - Commercial Items
52.212-3 Offerors Representations and Certifications- Commercial Items;
52.222-22 Previous Contracts and Compliance Reports;
52.222-25 Affirmative Action Compliance;
52.225-25 Prohibition on Contracting with Entities Engaging in Sanctioned Activities Relating to Iran - Representation and Certification
All interested offerors must be actively registered in the System for Award Management (SAM) website located at https://www.sam.gov and must complete annual representations on-line in SAM in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required.
The following clauses apply to this acquisition:
52.204-7 System for Award Management;
52.245-1 Government Property;
52.232-40 Providing Accelerated Payments to Small Business Subcontractors;
52.247-34 F.o.b. Destination;
52.252-2 Clauses Incorporated by Reference;
52.212-4 Contract Terms and Conditions-Commercial Items;
52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-
Commercial Items including subparagraphs:
52.222-3 Convict Labor;
52.222-19 Child Labor - Cooperation with Authorities and Remedies;
52.222-21 Prohibition of Segregated Facilities;
52.222-26 Equal Opportunity;
52.222-36 Affirmative Action for Workers with Disabilities;
52.223-18 Contractor Policy to Ban Text Messaging While Driving;
52.225-1 Buy American Act Supplies (FEB 2009)
52.225-13 Restriction on Certain Foreign Purchases; and
52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration
The following Department of Commerce (CAR) provision applies to this acquisition:
1352.213-70 Evaluation Utilizing Simplified Acquisition Procedures
The following Department of Commerce (CAR) clauses apply to this acquisition:
1352.201-70 Contracting Officer's Authority;
1352.209-72 Restrictions Against Disclosure;
1352.209-73 Compliance with the Laws;
1352.209-74 Organizational Conflict of Interest;
1352.246-70 Place of Acceptance; and,
Other appropriate clauses as needed
Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm
***This is an Small Business Set-aside Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows:
The Offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition."
OR
The Offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following:
Offeror shall list exception(s) and rationale for the exception(s).
Offerors that fail to furnish required representations or information, or reject the terms and conditions of the solicitation may be excluded from consideration.
***Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an Offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the Offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation.
***Offerors shall e-mail their quotation to [email protected] so that it is received by the response date/time for this solicitation. It is the responsibility of the offeror to confirm NIST's receipt of its quotation. Each quotation shall include sufficient data to allow the Government to determine the amount, realism and consistency of the quoted fixed price.
***All questions regarding this solicitation shall be submitted in writing via e-mail to the Contract Specialist, Janice Moten, at [email protected] no later than 12:00PM EST August 20, 2014.
***The due date and time for receipt of quotations is August 26, 2014 no later than 12:00PM EST.