The CNST NanoFab is a state-of-the-art nanofabrication laboratory which utilizes an atomic layer deposition (ALD) tool for conformal thin film coating on high aspect nano-structures or inside nano-porous materials. ALD is a chemical precursor reaction based self-limiting coating process. To control and explore chemical reactions in plasma and thermal ALD processes, an in-situ monitor to "watch" the precursor, water and other chemicals during the process is necessary.

The CNST NanoFab has a need for a residual gas analyzer (RGA), which is a small mass spectrometer designed for process control and chemical contamination monitoring in vacuum systems, that would meet the following requirements:

1. The RGA will be used for ALD process monitoring, so it must be able to monitor the delivery of ALD precursors/chemicals into the vacuum chamber and detect the surface chemical reaction during the ALD process.

2. The RGA must be able to detect minute traces of chemicals in the low-pressure gas environment. Minimum detectable concentration should be sub-ppm and minimum detectable partial pressure should be 2e-11 or lower.

3. The RGA detection pressure range must match ALD process pressure range which is from 1 mT to several Torr.

4. The RGA will be used on an existing Oxford Instruments ALD system, so it must offer a special adaptor for mounting on our ALD inlet. Special protection design for avoiding precursor condensation must be available.
5. The RGA must include a back-out heat jacket, turbo-molecular pump, control computer and software.

After results of this market research are obtained and analyzed and specifications are developed for a residual gas analyzer that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside.

NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification and socioeconomic status in any response to this notice.

Companies that manufacture such residual gas analyzers are requested to email product literature describing their capabilities to [email protected] no later than the response date for this sources sought notice. The following information is requested to be provided as part of the response to this sources sought notice:

1. Name of the company that manufactures the system components for which specifications are provided.

2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address).

3. Indication of number of days, after receipt of order that is typical for delivery of such systems.

4. Indication of whether each instrument for which specifications are sent to [email protected] are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s).

5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.

Point of Contact
Eric Bubar, Contracting Specialist, Phone (301) 975-3635, Email [email protected]