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Maximum processing temperature: 1150°C Heating ramp rate = 10C to 150C per second Cooling ramp rate = 10C to 150C per second Quartz Tray for 4-6 inch Round Wafers 3 MFCs (N2, O2, Ar) Temperature uniformity = +/- 5C across 4” wafer 1 x 208V AC (100A max), (2 Line, 1 Neutral, 1 Ground) 1 x 120 V AC, 3 Wire, 10A Recipe driven calibration and processes – PSWD protected Full GUI and software control – control and monitoring Table top unit EMO

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