NOTICE OF INTENT TO AWARD A SOLE SOURCE
This Notice of Intent is not a request for competitive proposals. This is not a solicitation or request for offers. No solicitation package is available and telephone requests will not be honored. Only one responsible source and no other supplies or services will satisfy agency requirements.
This purchase will be made utilizing Simplified Acquisition Procedures:
• Federal Acquisition Regulation (FAR) Part 13.106-1(b) for purchases not exceeding the simplified acquisition threshold of $150,000.
• FAR Part 13.501 (a) for purchases exceeding the simplified acquisition threshold of $150,000.

The Naval Research Laboratory (NRL) intends to award a sole source purchase order to
ARRADIANCE, INC. (Company Name) of SUDBURY, MA. (City, State) to furnish:

______See Attached Inquiry of Availability ___X____ See Below

Item 001:
-Qty 1: 2 Zone 1500W Plasma/Thermal chamber including:
Up to 300C process temperature 1.25" Reactor height 200MM Dia Single Layer Sample end effector Digital Convection Vacuum Gauge 1 x 10-4 to 1000 Torr with Display Mass flow Controlled 200SCCM N2
calibrated inert carrier gas Heated (125C)vacuum isolation valve KF-50 Plasma head interface KF-40 spare metrology/reactor external interface KF-50 vacuum port interface

-QTY 1: ALD Material Distribution Manifold Including:
2 200C Manifold Zones 9 High Speed 10ms Thermal ALD Valves 8 ALD Material interface ports 1 Vapor Push Port (carrier gas assist)
-QTY 2: Moveable up to 175C Material heater zones
-QTY 6: 150ml DOT Certified ALD Precursor bottles
-QTY 2: External Interface with ball valve
-QTY 1: 120V/20A/60Hz USB control module
-QTY 1: XT Plasma System Including:
300W Plasma Air cooled HEAD KF50

MOUNTING
120V/20A/60Hz plasma control module Plasma air cooled automatic matching network and RF power supply

-QTY 1: 200 SCCM Mass Flow Controller for Inert/Carrier Gas Input

-QTY 3: 50SCCM Mass flow controllers for plasma gas input

-QTY 4: Toggle On/Off valves for plasma head input lines

-QTY 1: Windows 8 Laptop Computer package

Qty: 1 Ea.

 Item 002:
ARR-EV-A10-P EBARA DRY Pump, N2 Purged Peak pumping speed 35 CFM Ultimate Pressure 22 Mtorr Inlet Connection NW40 Outlet Connection NW40 N2 Purge, 20psi Air cooled Power 1P/3P, 200-240V (50/60 Hz) 3kVA
Qty: 1 Ea.

Item 003:
ARR-840900-OZ OZONE Kit Including:
-QTY 1: Pacific Ozone R-LAB111 (115 230W) 8%8.2x21.0x18.3
-QTY 1: Pacific Ozone D212 Ozone Destructor
-QTY 1: Ozone Badges (10pk)
-QTY 1: 0-15 psi Gauge
-QTY 1: Metering Valve
-QTY 1: Ball valve

Qty: 1 Ea.

The North American Industry Classification System Code (NAICS) for this requirement is 334516 with the size standard of 1000 EMPLOYEES.
The Federal Supply Code (FSC) / Product Service Code (PSC) procurement is 6640.

Interested parties may identify their interests and capability to respond to this requirement within fifteen (15) calendar days of the publication of this notice. Any response to this notice must show clear and convincing evidence that competition would be advantageous to the Government. Information received will be considered solely for the purpose of determining whether or not to conduct a competitive procurement. A determination by the Government not to compete this proposed purchase order based upon response to this notice is solely within the discretion of the Government. No reimbursement for any cost connected with providing capability information will be provided.
The point of contact is: Cheryl Benthall, email: [email protected].
Please reference this Notice of Intent number on your correspondence and in the "Subject" line of your email.
This notice will close on: 07APR16 at 4PM, local time, Washington D.C.