The National Institute of Standards & Technology (NIST) seeks information on commercial vendors that are capable of providing a Photoresist Curing Hotplate which is required for a photoresist stabilization step where patterned photoresist material is exposed to UV wavelength and also heated under softbake temperature to allow photoresist reflow and produce smooth surface profile. This process creates a robust and well-defined surface polymer layer in the shallow surface of patterned photoresist and yields stronger etch resistance, cleaner ashing and higher implant temperatures. This hotplate must be able to handle various size of samples and provide uniform heating for up to 200mm x 200mm area. Vacuum function and programmable heating process control are required.

After results of this market research are obtained and analyzed and specifications are developed for the Photoresist Curing Hotplate that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside.

NIST has a need for a Photoresist Curing Hotplate that would meet the following preliminary requirements:

Photoresist Curing Hotplate:

• Handle various size of samples up to 200mm wafer
• Vacuum chuck with lift-pins
• Table top
• Heated vacuum sample stage goes up to 250 °C or higher
• Programmable control on heating time and temperature
• Option: Hood with nitrogen environment control and additional space for a UV lamp installation.

NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice.

Companies that manufacture Photoresist Curing Hotplates are requested to email a detailed report describing their abilities to [email protected] no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to [email protected] are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.

 

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