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NIST has a requirement for chemical precursors to support thin film coating for its atomic layer deposition (ALD) system sited in the Center for Nanoscale Science and Technology (CNST), NIST's nanotechnology user facility. These precursors will be used on the Oxford Atomic Layer Deposition (ALD) system for coating thin film on varied substrates. The Oxford ALD is an existing system sited in a class 100 clean room and used as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies in the CNST NanoFab. Applications include conformal, pin-hole free and ultra-thin film coating on flat and patterned surfaces.
ALD chemical precursors are special chemicals for growing thin film materials in ALD for nanofabrication. The CNST employs an Oxford FlexALRPT to serve its users with a variety of applications including conformal, high k material, multi-layer coatings. Chemical precursors are consumable and key parts for ALD processes, which need to be refilled periodically.
These chemical precursors not only must meet the CNST's process needs, but must meet the physical and process specifications of our tool manufacturer, Oxford. The Oxford ALD system has a unique design that will only accept an SAFC stainless steel delivery container for the required chemicals. The container has unique physical characteristics such as size, gas delivery lines, and line spacing that allow it to safely fit in the ALD system. In addition, the delivery container has an electric heater and temperature sensor which the Oxford ALD is designed to connect to. Proper connections and electrical parameters are critical to the safe operation of the Oxford ALD.
SAFC Hitech is the only contractor that can provide ALD precursors with the required characteristics of size, gas delivery lines, line spacing, electric heater, and temperature sensor that make it compatible with the Oxford FlexALRPT system employed by the CNST. Therefore, SAFC Hitech is uniquely qualified to provide the required ALD precursors.
Delivery shall be FOB Destination, Gaithersburg, MD, and be completed in accordance with the Contractor's commercial schedule. This requirement is expected to be awarded in March, 2014.
The North American Industry Classification System (NAICS) code for this acquisition is 334516, and the size standard is 500 employees.
No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, interested persons may identify their interest and capability to respond to this requirement. The Government will consider responses received by 3:00 p.m. (EST) on February 12, 2014. Inquiries will only be accepted via email to [email protected]. No telephone requests will be honored.
A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future.