Physik Instruments (mfg)

1ea   6-Axis Hexapod, vacuum compatible to 10-6 Torr, Max Dimensions: 200mm dia top x 300mm dia base x 200mm tall. Min linear travel range X, Y: +/- 22.5mm, Min linear travel range Z: +/- 12.5mm, Min angular travel range X, Y: +/- 7.5 deg, Min angular travel range Z: +/- 12.5 deg, Min incremental linear motion X, Y, Z: 1.0 micrometers, Min incremental angular motion X, Y, Z: 0.001 deg, Linear repeatability X, Y, Z: +/- 1.0 micrometers, Angular repeatability X, Y Z: +/- 0.0005 deg, Linear velocity X, Y, Z: 0.5mm/s, Angular velocity X, Y, Z: 0.001 deg/s, Min load capacity: 10kg, Controller included, controller cable in-vacuum: 1.5meters, Controller cable in air: 5 meters

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