The National Institute of Standards and Technology (NIST) Acquisition Management Division, on behalf of the NIST Center for Nanoscale Science and Technology (CNST), intends to negotiate with SPEC Equipment; Santa Clara, CA, on a sole source basis under the authority of FAR Subpart 6.302-1 - only one responsible source and no other supplies or services will satisfy agency requirements, to purchase a downstream plasma asher.

The downstream plasma asher system will be used to support nanofabrication research and development in the (CNST) user facility. The system will be sited in a class 100 cleanroom and used as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies, ranging from nanolithography novices to experts in the field. NIST currently owns and operates a single oxygen plasma (barrel type) asher in the NanoFab that is heavily used for removing photoresist and cleaning substrates in a wide range of projects. The existing asher can no longer meet the needs of all NanoFab users in terms of capacity as well as performance. In order to increase NIST's ashing capacity and to provide users with advanced ashing technology, NIST has a need for a new downstream plasma ashing system. Due to the rigors of a heavily used, shared laboratory resource, the NanoFab requires a reliable system with minimal cost of ownership and excellent performance. A microwave plasma source is required for the necessary power consumption, maintenance, and density of ions. Market research did not show any additional manufacturers that could meet all of the requirements, including the microwave plasma asher requirement. This notice is a follow-on to Sources Sought notice AMD-13-SS12.

The NAICS Code is 334516- Analytical Laboratory Instrument Manufacturing with a size standard of 500 employees. NIST anticipates negotiating and awarding a firm-fixed-price purchase order to SPEC Equipment for this requirement in the 3rd quarter of fiscal year 2013.

Interested parties that believe they could satisfy the requirements listed above for NIST may clearly and unambiguously identify their capability to do so in writing on or before the response date for this notice. This notice of intent is not a solicitation. Information submitted in response to this notice will be used solely to determine whether competitive procedures could be used for this acquisition. Any questions regarding this notice must be submitted in writing via email to Eric Bubar at [email protected]. All responses to this notice of intent must be submitted so that they are received at [email protected] no later than May 15, 2013 at 5:00 pm.

Contracting Office Address:
100 Bureau Drive, Building 301, Room B129, Mail Stop 1640
Gaithersburg, Maryland 20899-1640

Place of Performance:
100 Bureau Drive
Gaithersburg, Maryland 20899
United States

Primary Point of Contact:
Eric Bubar,
Contract Specialist
[email protected]
Phone: 301-975-3635
Fax: 301-975-8904

Bid Protests Not Available