Sources Sought for the following:
Microfluidic cylindrical liquid jet device
The cost should include: Setup Costs, Mask for 4" substrate, wafer 90x90mm usable surface, Hydrophobic coating - 30 chips, and laser separation.
Spec's
DESIGN Amount
Masks 5
Chios on one wafer t. b d
Total amount of designs To be agreedTOP LAYER Size Tolerance
Material Borosilicate glass Thickness 400um +/-40um
Channels Etching Depth 1 10um +/-1 um
Minim um width 30um
Depth 2 10+10um +/-2um
Minimum width 50um
Holes Powderblasting Large diameter 400um +/- 150um
Small diameter 200um +/- 150um
BOTTOM LAYER Size Tolerance
Material Borosilicate glass Thickness 400um +/- 40um
Channels Etching Depth 1 10um +/- 1um
Minimum width 30m
Depth 2 10+10um +/- 2um
Minim um width 50um
SEPARATION Size tolerance
Chip Width 6m m t b d
Chip Length 17mm t b.d
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