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Award Info Published Friday June 10, 2016 Awarded to: Vendor: Kurt J. Lesker Company Ltd, Jefferson Hills, PA Amount: An estimated $152,835 Terms: One-time transaction The University award process may be delayed up to thirty days as this award goes through a state approval process. The hearing has been cancelled Published Monday June 6, 2016 The hearing has been cancelled since no vendors registered to attend or submitted comments regarding this notice. First published Friday, May 20, 2016 The University awarded a contract for Atomic Layer Deposition System-ALD-150LE to Kurt J. Lesker Company Ltd, Jefferson Hills, PA, for an estimated $152,835. Purchase from Kurt J. Lesker Company Ltd their ALD-150LE. Only the ALD-150LE has: (i) multi-precursor liquid/solid/gas reactant input manifold with up to 7 reactants; (ii) pulsed gas reactant input; (iii) reactant delivery lines heated to 200 C; (iv) operating pressure up to 10 Torr; (v) substrate area of 150 mm in diameter; (vi) multiple real-time screens for all essential functions and variables of atomic layer deposition; (vii) excellent temperature uniformity across the entire substrate surface area; (viii) perpendicular flow reactor chamber for efficient gas/vapor delivery. The ALD-150LE has a warm, not hot wall reactor which allows for independent control of substrate and chamber heating. Each has its own independent heater and control zone. The benefits of this are more process control, higher throughput because the entire chamber doesn?t need to be heated (it is much easier to heat the smaller substrate), and also the ability to quickly raise and lower substrate temperature. Another significant advantage of a warm versus hot wall reactor is that the effects of gas phase reactions during ALD are a significant problem with Hot Wall designs because some degree of overlap between precursors during ALD processing is typically present (especially when shorter cycle times are being used) resulting in parasitic ALD effects. In this case, elevated reactor temperatures promotes gas phase reactions that generate particles detrimental to ALD film quality. In contrast, warm wall reactors (Kurt Lesker Design) have the added benefit of minimizing the potential for these gas phase reactions by reducing the chamber wall temperature relative to the substrate. Also, warm wall reactor designs are also inherently less energy intensive than hot wall designs since the high temperature heating is directed only to the substrate through the substrate heater. The University has determined that this purchase is only economically available from this source because the items are required for research and no other source is able to meet the researcher's documented needs. For additional information, contact: John Meehan University of Ilinois at Chicago Purchasing Division (M/C 560) 809 South Marshfield Avenue Chicago, IL 60612-7203 Phone: (312) 413-5961 FAX: (312) 996-2055 Purchasing Website State Purchasing Officer - Aaron M. Finder We will hold a public hearing at the date, time and location specified below, if we receive a request to testify regarding the sole source determination. We will also hold a hearing if any vendor submits a signed statement showing the capability to provide the stated supplies/services at or below the amount indicated. The public hearing allows any interested party the opportunity to testify for or against the sole source determination as described in this notice. The purpose of the hearing is to receive information from the public in a reasonable manner. Formal rules of evidence will not apply. The hearing officer will produce minutes of the hearing and may record it in order to aid in the production of the minutes. After conclusion of the hearing we will decide whether the sole source determination was appropriate. We must receive any request to testify and any vendor statement no later than the registration date and time indicated below. If we do not receive a timely request or statement, we will not hold the hearing. We reserve the right to cancel the procurement prior to any scheduled hearing. Please confirm the status of the hearing with the Hearing Contact. Hearing Details Date: June 8, 2016 Time: 2:00 PM Location: Stratton Building Room 511 401 S. Spring Street Springfield, IL Hearing Contact: Aaron M. Finder Phone:(217) 720-7105 Fax:(217) 558-5407 E-mail:[email protected] Date, time, and location are subject to change and/or cancellation. It is the responsibility of potential participants to confirm these details prior to attendance. Registration Registration Deadline: June 3, 2016 Register with: Aaron M. Finder Phone:(217) 720-7105 Fax:(217) 558-5407 E-mail:[email protected]

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