This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6. This announcement consititutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Solicitation 2ME22201 is issued as a request for proposal. The NAICS code is 333295 and the SIC is 3559 with a small business size standard of 500 employees. This requirement is a 100% small business set aside requirement for an Inductive Coupled Plasma (ICP) Etcher which shall meet the following minimum requirements:Capability of etching with both ICP and RIE modes; System console with on-board programmable logic controller; Microsoft Windows based graphical user interface control software for recipe storage, password security control, and data logging installed on an included IBM compatible pc; ICP process chamber with view port; Laser interferometer end point detection system integrated into the graphical user interface control software. Include software window with closed circuit video image and data gathering software; 240mm water cooled aluminum RIE electrode; 30/300W Watt solid state 13.56MHz RF generator with digital automatic matching network close-coupled to the lower electrode; ICP source with automatic matching network; 100 mTorr capacitance manometer, isolation valve and penning gauge; External gas manifold with six non toxic mass flow controlled gas lines; Turbomolecular pump with nitrogen purged bearings and Fomblin rotary roughing pump complete with filters. Turbomolectular pump must be at least 400 liters/sec and roughing pump must be at least 30 meter3/hour; 1 complete set of printed operation and maintenance manuals; On-site unpacking and installation preparation of ICP etcher and consultation with DMEA installers; On-site post installation startup and verification of operation; and a minimum of a 6 month warranty (parts and labor)is required. Quantity of 1 each for FOB Destination to McClellan, CA 95652-2100. Catalog literature will be required to be submitted on the equipment proposed. The following FAR clauses apply: 52.212-1, Instructions to offerers Commercial; 52.212-3, Offeror Representations and Certifications-Commercial Items; 52.212-4, Contract Terms and Conditions-Commercial Items; 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items. Offerors must include a completed copy of the provision 52.212-3, Offeror Representations and Certifications-Commercial Items. DPAS rating is C9. Offerors are due at 3:00PM Pacific time on March 4, 2002 by email to Judy Hilton at [email protected]. Contractors must be registered in the Central Contractor Registration (CCR) prior to an award. Questions regarding this solicitation must be in writing and faxed to Judy Hilton at (916) 231-2826. See Note 1.

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