RESPONSE REQUIREMENTS NOTICE:THIS IS A SOURCES SOUGHT REQUEST FOR EXPRESSION OF INTEREST. All RESPONSES MUST BE SUBMITTED BY EMAIL ONLY TO Nancy Morreale, SANDIA CONTRACTING REPRESENTATIVE: [email protected]. PHONE CALLS CAN NOT BE ACCOMMODATED. DO NOT SEND ANY RESPONSES TO POSTING AGENT DONALD ROSEBOROUGH RESPONDENTS CONSIDERED BY SANDIA TO BE MOST RESPONSIVE IN DESCRIBING THEIR CAPABILITIES TO MEET THE SPECIFICATION REQUIREMENTS STATED HEREIN WILL RECEIVE A DETAILED SOLICITATION WITH ALL REQUIREMENT, GENERAL PROVISIONS AND TERMS AND CONDITIONS. Preliminary Specification for Microwave Downstream Asher/Etch System This specification describes the requirements for a Downstream Microwave Asher/Etch system to be used for removing photoresist and other organic materials from semiconductor devices in the Microsystems and Engineering Sciences and Applications (MESA) facility at Sandia National Laboratories. This document addresses the required equipment specifications, documentation, and pre-shipment and post-shipment acceptance testing. The specific required testing necessary for final system acceptance is addressed in this document. The preliminary specification may be accessed via website URL location http://www.sandia.gov/bus-ops/scm/Contractor/Contractor-info.html, under the "Policies" tab to topic entitled "Special Policies & Information", located near the bottom of the page.

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