Specs:

• Chemical series dry rotary vane pump
• Shall be a dry pump, i.e., bearings and hydrocarbon lubricants shall be isolated from the vacuum.
• Shall be suitable for corrosives, i.e., fluorine based plasma etching applications.
• Shall have chem-raz seals and stainless steel fittings to better withstand corrosives.
• Peak pumping speed shall be 15.1 m^3/h or greater.
• Ultimate vacuum shall be 0.007 mbar or less.
• Maximum continuous inlet pressure shall be 200 mbar or greater.
• Noise level shall be 52 dB or less.
• Inlet and Exhaust flanges shall be NW25.
• Shall include controller with push button control, remote serial and parallel control and USB service interface.
• Shall use 120 VAC power.

☒52.212-1 Instructions to Offerors - Commercial Items (Jan 2017)
Addendum to 52.212-1

Quotes for the item(s) described in the RFQ are due by 5/24/2018 by 3 p.m. CT to Victoria C. Hargrave at [email protected] in order to be considered for award. If it is in the best interest of the Government, quotes submitted after the due date may be accepted. Quotes shall remain valid for 30 days unless otherwise expressly stated on the quote. Submitted Quotes shall list two points of contacts including name, phone number, and email address.

All contractual and technical questions must be in writing (e-mail) to Victoria C. Hargrave at [email protected] no later than 5/23/2018 by 3 p.m. CT. Telephone questions shall not be accepted.
The NAICS Code for this procurement is 334513.

This procurement is set aside for small business.

Offeror's shall be registered at www.sam.gov in order to be considered for award.

Delivery is FOB Destination.